PDC-32G / PDC-001 / PDC-001-HP
特徴
小型プラズマ装置の世界ブランド
米国Harrick Plasma社のプラズマクリーナーは60件以上の特許を有し30年以上の実績がある小型プラズマ装置です。4000件以上の技術論文にHarrick Plasma社のプラズマクリーナーが引用されるなど、大学や研究機関向け実験用機器として、世界中で愛用されている小型・卓上プラズマ装置のベストセラーモデルです。
出力、チャンバー径違いの3機種をご用意。違いは仕様の欄をご確認ください。お問い合わせの際は機種名をご記入お願いします。
プラズマ処理には装置の他、真空ポンプが必要です。真空ポンプの仕様はお問合せ下さい。パイレックスガラスチャンバーが標準仕様で、オプションで石英もございます。
- 高密度なプラズマ処理
チャンバー容積を最小限にすることで、密度の高いプラズマによる効率的で短時間のプラズマ処理を実現。 - 等方性な処理
チャンバー内が方向性がない等方的なプラズマ処理環境域であり、円筒形内壁の処理にも対応。 - プラズマ発生出力の3段階調整
試料表面自体へのダメージを考慮したプラズマの出力調整が可能。 - 幅広いアプリケーション
光学材料/樹脂/金属/バイオマテリアルなど幅広い用途に対応。 - 各種ガスプラズマへの対応
本体内部は純酸素ガスを用いた酸素プラズマに標準対応。水素など他のガスにももちろん対応です。 - 再現性の良い処理
プラズマ処理に使用するガスの流量調整可能な流量計(2系統)と真空計のついたプラズマフローを連結可能で処理再現性向上。真空計単体もあります(処理には必須ではありません)。 - 最小サイズのコンパクト設計
最小のPDC-32Gは本体のフットプリントは26cm x 22cmのみ。実験系の省スペース化に貢献。
チャンバー容積が最小限の為、プラズマ密度が高く効率的な処理が可能。処理時間は40秒~数分程度。
プラズマクリーナーの使用例(動画サイトへのリンク)
Harrick Plasma社のプラズマクリーナーは、世界中の様々な研究機関で利用されています。
プラズマクリーナーアプリケーション事例
アプリケーションを3つアプリケーションBook(PDF)にてご紹介します。
・音響 流体工学(バイオ&メディカル)
・スピンコーティング (デバイス製造)
・銀 ナノ 粒子の 表面プラズ モン共鳴の向上(材料科学/ナノスケールクリーニング)
アプリケーションBook(PDF)ダウンロードはこちら
コロナウイルス等の免疫測定(イムノアッセイ情報ページ)装置の感度向上に使用された例など、このほかのアプリケーションは「導入事例」をご覧ください。
プラズマクリーナー
-
製品ラインナップ
チャンバーの大きさでモデルが異なります。PDC-32G(小型チャンバー)、PDC-001(大型チャンバー)、PDC-001-HP(大型、高出力)
-
プラズマフロー(PDC-FMG)
チャンバーに導入するガス2系統の流量調整ができ、チャンバー内の真空圧力を表示することができます。オプション。 -
-
設置レイアウト
-
プラズマフロー(PDC-FMG)はプラズマクリーナー(PDC-32G)の上に重ねて設置できます。
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サンプルトレー、石英チャンバー
- サンプルトレー
小さなサンプルを設置するのに便利なアクセサリー(通常パイレックス製)。PDC-32Gではスライドガラスの場合4枚設置できます。(オプション)
- 石英チャンバー、石英サンプルトレー
反応性ガス使用時もしくは、クロスコンタミを考慮するアプリケーションの際は石英チャンバー、石英サンプルトレーをご使用ください。(オプション)
装置正面、装置背面、真空ポンプ
仕様
■プラズマクリーナー(小型プラズマ装置)
型番:PDC-32G
本体寸法:高さ216mm、幅254mm、奥行き:216mm
チャンバー寸法:直径76.2mm、奥行き:165.1mm
RF出力:最大18W
■プラズマクリーナー(大型プラズマ装置)
型番:PDC-001
本体寸法:高さ279.4mm、幅457.2mm、奥行き:228.6mm
チャンバー寸法:直径152.4mm、奥行き:165.1mm
RF出力:最大30W
*96ウェルプレートの挿入も可能。
■プラズマクリーナー(大型高出力プラズマ装置)
型番:PDC-001-HP
本体寸法:高さ279.4mm、幅457.2mm、奥行き:228.6mm
チャンバー寸法:直径152.4mm、奥行き:165.1mm
RF出力:最大45W
*96ウェルプレートの挿入も可能。小容積でのRF45W高出力による10-100nm/minの有機薄膜アッシングが可能なソフトアッシング装置
■プラズマフロー(2系統流量制御、真空計) 流量調整により再現性高い処理が可能、真空度確認で条件確認可能。
型番:PDC-FMG
本体寸法:高さ215.9mm、幅254mm、奥行き:203.2mm
■プラズマゲージ(真空計) デジタル表示の真空度確認により処理の条件設定も安心。
型番:PDC-VCG
本体寸法:高さ127mm×幅254mm×奥行き216mm
*ポンプ以外は115V仕様です。プラズマクリーナーは100Vでも使用可能ですが、高周波出力が少し下がります。
■真空ポンプ 処理に必須。
要求仕様
排気速度 : 25L/min以上
到達真空度 : 200mTorr以下
実験系の省スペース化を考慮したコンパクト設計。純酸素、水素プラズマの場合はドライポンプを使用します。実績あるポンプを弊社でご用意もできます。適したホース、継ぎ手も合わせて納品いたします。
導入事例
様々なアプリケーションに対応
有機物除去
光学材料/樹脂/金属/バイオマテリアルなど様々なサンプルに対応
PDMSの接着
約40秒の短時間でPDMSとガラス、PDMS同士の不可逆接着の前処理
*PDMSの接着は、接着性、密着性の強い純酸素ガスを用いた酸素プラズマでの処理をお勧めします。
マイクロ流路の有機物除去、親水性処理
狭い流路、奥まった表面のプラズマ処理
ITOガラス基板の表面処理
ITOの仕事関数の向上・調整
バイオマテリアルの滅菌
高温/化学的処理に不適な歯科・医学材料(器具)の滅菌
バイオセンサーの表面活性化
バリアコーティング
ソフトエッチング
疎水性処理
接着性向上
細胞培養の前処理
表面線状、表面改質、表面処理、滅菌処理など、あらゆる素材のプラズマ処理に対応!
アプリケーションノート(PDFのリンク)
これ1台で、様々なプラズマ処理を簡単に実験可能な業界最小サイズのプラズマ処理装置。
実験データ
- Surface Modification of 316L Stainless Steel
- Air Plasma on PDMS
- contact angle
お役立ち資料ダウンロード
製品に関するアプリケーション事例、その他技術情報をダウンロードいただけます。
技術情報
ユーザー発表記事
論文
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特許
- Guo G. "Plasma Assisted Method of Accurate Alignment and Pre-Bonding for Microstructure Including Glass or Quartz Chip". US20170301564A1 (2017).
- Yu S, and Liu J. "Nano-alumina low temperature plasma treatment". CN106317714B (2016).
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- Renn MJ. "Method and Apparatus for Low-Temperature Plasma Sintering". US20070154634 A1 (2007).
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- Polizzotti RS, Yeganeh M, and Dougal SM. "Water Vapor Plasma Treatment of Glass Surfaces". US006106653 (2000).
- Li VC, and Wu H-c. "Control of Interface Properties Between Fiber/Cementitous Material Using Plasma Treatment". US005788760 (1998).
論文
- Sandoval-Olvera IG, González-Muñoz P, Palacio L, Hernández A, Ávila-Rodríguez M, and Prádanos P. "Ultrafiltration membranes modified by PSS deposition and plasma treatment for Cr(VI) removal". Sep. Purif. Technol. 2019 210: 371-381 10.1016/j.seppur.2018.08.023
- Bobby S, and Mohammed AS. "Evaluation of parameters affecting adhesive strength of high build epoxy coatings on textured and plasma treated metallic substrates". J. Adhes. Sci. Technol. 2018 32: 407-428 10.1080/01694243.2017.1359872
- Chen C-f. "Characterization of fracture energy and toughness of air plasma PDMS–PDMS bonding by T-peel testing". J. Adhes. Sci. Technol. 2018 32: 1239-1252 10.1080/01694243.2017.1406877
- Duan Y, Rani S, Newberg JT, and Teplyakov AV. "Investigation of the influence of oxygen plasma on supported silver nanoparticles". J. Vac. Sci. Technol. A 2018 36: 01B101 10.1116/1.4986208
- Enciso B, Abenojar J, Paz E, and Martinez MA. "Influence of Low Pressure Plasma Treatment on the Durability of Thermoplastic Composites LDPE-flax/coconut under Thermal and Humidity Conditions". Fibers Polym. 2018 19: 1327--1334 10.1007/s12221-018-1086-4
- Guo X-C, Hu W-W, Tan SH, and Tsao C-W. "A stretchable conductive Polypyrrole Polydimethylsiloxane device fabricated by simple soft lithography and oxygen plasma treatment". Biomed. Microdevices 2018 20: 30 10.1007/s10544-018-0273-9
- Hosomi K, Ozaki K, Nishiyama F, and Takahiro K. "Enhancement in volatile organic compound sensitivity of aged Ag nanoparticle aggregates by plasma exposure". Appl. Surf. Sci. 2018 427: 848-853 10.1016/j.apsusc.2017.07.155
- Kong X, Xu Y, Cui Z, Li Z, Liang Y, Gao Z, Zhu S, and Yang X. "Defect enhances photocatalytic activity of ultrathin TiO2 (B) nanosheets for hydrogen production by plasma engraving method". Appl. Catal., B 2018 230: 11--17 10.1016/j.apcatb.2018.02.019
- Lee DH, Park JS, Hwang JH, Kang D, Yim S-Y, and Kim JH. "Fabrication of hollow nanoporous gold nanoshells with high structural tunability based on the plasma etching of polymer colloid templates". J. Mater. Chem. C 2018 6: 6194-6199 10.1039/C8TC01658E
- Meng J, Nie W, Zhang K, Xu F, Ding X, Wang S, and Qiu Y. "Enhancing Electrochemical Performance of Graphene Fiber-Based Supercapacitors by Plasma Treatment". ACS Appl. Mater. Interfaces 2018 10: 13652-13659 10.1021/acsami.8b04438
- Nishihara Y, Chikamatsu M, Kazaoui S, Miyadera T, and Yoshida Y. "Influence of O 2 plasma treatment on NiO x layer in perovskite solar cells". Jpn. J. Appl. Phys. 2018 57: 04FS07 10.7567/JJAP.57.04FS07
- Pousti M, and Greener J. "Altered biofilm formation at plasma bonded surfaces in microchannels studied by attenuated total reflection infrared spectroscopy". Surf. Sci. 2018 676: 56-60 10.1016/j.susc.2018.01.004
- Rivka C, Farber R, Dabush-Busheri I, Chaniel G, Rozenfeld S, Bormashenko E, and Multanen V. "Biofilm formation on agricultural waste pretreated with cold low-pressure nitrogen plasma and corona plasma discharges". bioRxiv 2018 10.1101/299172
- Segura-Ponce LA, Reyes JE, Troncoso-Contreras G, and Valenzuela-Tapia G. "Effect of low-pressure cold plasma (LPCP) on the wettability and the inactivation of escherichia coli and listeria innocua on fresh-cut apple (granny smith) skin". Food Bioprocess Technol. 2018 11: 1075-1086 10.1007/s11947-018-2079-4
- Wang S, Wang X, Wang L, Pu Q, Du W, and Guo G. "Plasma-assisted alignment in the fabrication of microchannel-array-based in-tube solid-phase microextraction microchips packed with TiO2 nanoparticles for phosphopeptide analysis". Anal. Chim. Acta 2018 1018: 70-77 10.1016/j.aca.2018.02.018
- Chu XS, Li DO, Green AA, and Wang QH. "Formation of MoO3 and WO3 nanoscrolls from MoS2 and WS2 with atmospheric air plasma". J. Mater. Chem. C 2017 5: 11301-11309 10.1039/C7TC02867A
- El-Wassefy NA. "The effect of plasma treatment and bioglass paste on enamel white spot lesions". Saudi J. Dent. Res. 2017 8: 58-66 10.1016/j.sjdr.2016.10.001
- Enciso B, Abenojar J, and Martinez MA. "Influence of plasma treatment on the adhesion between a polymeric matrix and natural fibres". Cellulose 2017 24: 1791-1801 10.1007/s10570-017-1209-x
- Hui LS, Whiteway E, Hilke M, and Turak A. "Synergistic oxidation of CVD graphene on Cu by oxygen plasma etching". Carbon 2017 125: 500-508 10.1016/j.carbon.2017.09.076
- Li J, Tao Y, Chen S, Li H, Chen P, Wei M-z, Wang H, Li K, Mazzeo M, and Duan Y. "A flexible plasma-treated silver-nanowire electrode for organic light-emitting devices". Sci. Rep. 2017 7: 16468 10.1038/s41598-017-16721-7
- Morro A, Catalina F, Pablos J, Corrales T, Marin I, and Abrusci C. "Surface modification of poly(ε-caprolactone) by oxygen plasma for antibacterial applications. Biocompatibility and monitoring of live cells". Eur. Polym. J. 2017 94: 405-416 10.1016/j.eurpolymj.2017.07.027
- Puppolo MM, Hughey JR, Weber B, Dillon T, Storey D, Cerkez E, and Jansen-Varnum S. "Plasma modification of microporous polymer membranes for application in biomimetic dissolution studies". AAPS Open 2017 3: 9 10.1186/s41120-017-0019-4
- Tran VS, Ngo HH, Guo W, Ton-That C, Li J, Li J, and Liu Y. "Removal of antibiotics (sulfamethazine, tetracycline and chloramphenicol) from aqueous solution by raw and nitrogen plasma modified steel shavings". Sci. Total Environ. 2017 601-602: 845-856 10.1016/j.scitotenv.2017.05.164
- Vaagensmith B, Reza KM, Hasan MN, Elbohy H, Adhikari N, Dubey A, Kantack N, Gaml E, and Qiao Q. "Environmentally Friendly Plasma-Treated PEDOT:PSS as Electrodes for ITO-Free Perovskite Solar Cells". ACS Appl. Mater. Interfaces 2017 9: 35861-35870 10.1021/acsami.7b10987
- Mehboob H, Bae J-H, Han M-G, and Chang S-H. "Effect of air plasma treatment on mechanical properties of bioactive composites for medical application: Composite preparation and characterization". Compos. Struct. 2016 143: 23--32 10.1016/j.compstruct.2016.02.012
- Schmerl NM, Gentle AR, Quinton JS, Smith GB, and Andersson GG. "Surface and Near Surface Area Density of States for Magnetron-Sputtered ZnO and Al-ZnO: A MIES, UPS, and VBXPS Study Investigating Ultrahigh Vacuum Sputter Cleaning and UV Oxygen Plasma". J. Phys. Chem. C 2016 120: 15772--15784 10.1021/acs.jpcc.5b11631
- Villegas M, Romero AI, Parentis ML, Vidaurre EFC, and Gottifredi JC. "Acrylic acid plasma polymerized poly (3-hydroxybutyrate) membranes for methanol/MTBE separation by pervaporation". Chem. Eng. Res. Des. 2016 109: 234--248 10.1016/j.cherd.2016.01.018
- Lai C-C, and Lo C-T. "Plasma oxidation of electrospun carbon nanofibers as supercapacitor electrodes". RSC Adv. 2015 5: 38868--38872 10.1039/c5ra04284d
- Martins TD, Bataglioli RA, Taketa TB, da Cruz Vasconcellos F, and Beppu MM. "Surface modification of polyelectrolyte multilayers by high radio frequency air plasma treatment". Appl. Surf. Sci. 2015 329: 287--291 10.1016/j.apsusc.2014.12.010
- Nania M, Matar OK, and Cabral JT. "Frontal vitrification of PDMS using air plasma and consequences for surface wrinkling". Soft Matter 2015 11: 3067--3075 10.1039/c4sm02840f
- Ozaki K, Nishiyama F, and Takahiro K. "Plasma-induced brightening and coarsening of tarnished Ag nanoparticles". Appl. Surf. Sci. 2015 357: 1816--1822 10.1016/j.apsusc.2015.10.017
- Psarski M, Pawlak D, Grobelny J, and Celichowski G. "Hydrophobic and superhydrophobic surfaces fabricated by plasma polymerization of perfluorohexane, perfluoro (2-methylpent-2-ene), and perfluoro (4-methylpent-2-ene)". J. Adhes. Sci. Technol. 2015 29: 2035--2048 10.1080/01694243.2015.1048131
- Sun T, Blanchard PY, and Mirkin MV. "Cleaning nanoelectrodes with air plasma". Anal. Chem. 2015 87: 4092--4095 10.1021/acs.analchem.5b00488
- Vishnuvarthanan M, and Rajeswari N. "Effect of mechanical, barrier and adhesion properties on oxygen plasma surface modified PP". Innov. Food Sci. Emerg. Technol. 2015 30: 119--126 10.1016/j.ifset.2015.05.007
- Choi JK, Jin ML, An CJ, Kim DW, and Jung H-T. "High-Performance of PEDOT/PSS Free Organic Solar Cells on an Air-Plasma-Treated ITO Substrate". ACS Appl. Mater. Interfaces 2014 6: 11047--11053 10.1021/am4049964
- Jiang L, Li S, Wang J, Yang L, Sun Q, and Li Z. "Surface Wettability of Oxygen Plasma Treated Porous Silicon". J. Nanomater. 2014 2014: 526149:1--6 10.1155/2014/526149
- Jung C-H, Kang D-W, Hwang I-T, Choi J-H, Lee J-S, Jang J-H, and Shin K. "The Fabrication of Patterned Gold Nanoparticle Arrays via Selective Ion Irradiation and Plasma Treatment". J. Nanosci. Nanotechnol. 2014 14: 6158--6161 10.1166/jnn.2014.8778
- Lycans RM, Higgins CB, Tanner MS, Blough ER, and Day BS. "Plasma treatment of PDMS for applications of in vitro motility assays". Colloid. Surface. B 2014 116: 687--694 10.1016/j.colsurfb.2013.11.007
- Meng Y, Li ZB, Chen X, and Chen JP. "Reducing wrinkles and cracks of metal films on PDMS substrate by hexane extraction and oxygen plasma etching". Microelectron. Eng. 2014 130: 8--12 10.1016/j.mee.2014.08.007
- Nam K-H, Jamilpour N, Mfoumou E, Wang F-Y, Zhang DD, and Wong PK. "Probing mechanoregulation of neuronal differentiation by plasma lithography patterned elastomeric substrates". Sci. Rep. 2014 4: 6965 10.1038/srep06965
- Parratt K, Yao JM, Poirier GR, and Yao N. "Plasma-Etching of the Organic Layer in Nacre". Soft Nanoscience Letters 2014 2014: 63--68 10.4236/snl.2014.43009
- Winkler K, Wojciechowski T, Liszewska M, Gorecka E, and Fialkowski M. "Morphological changes of gold nanoparticles due to adsorption onto silicon substrate and oxygen plasma treatment". RSC Adv. 2014 4: 12729 10.1039/c4ra00507d
- Ben-Amor S, Devin A, Rigoulet M, Sojic N, and Arbault S. "Oxygen Plasma Treatment of Platinized Ultramicroelectrodes Increases Sensitivity for Hydrogen Peroxide Detection on Mitochondria". Electroanalysis 2013 25: 656--663 10.1002/elan.201200409
- He H, Cai W, Dai Z, Liu G, and Li H. "Fabrication of porous Ag hollow sphere arrays based on coated template-plasma bombardment". Nanotechnology 2013 24: 465302 10.1088/0957-4484/24/46/465302
- Liu W, Cai Q, Zhang F, Wei Y, Zhang X, Wang Y, Deng X, and Deng X. "Dose-dependent enhancement of bone marrow stromal cells adhesion, spreading and osteogenic differentiation on atmospheric plasma-treated poly(L-lactic acid) nanofibers". J. Bioact. Compat. Polym. 2013 28: 453--467 10.1177/0883911513494623
- Meena JS, Chu M-C, Chang Y-C, You H-C, Singh R, Liu P-T, Shieh H-PD, Chang F-C, and Ko F-H. "Effect of oxygen plasma on the surface states of ZnO films used to produce thin-film transistors on soft plastic sheets". J. Mater. Chem. C 2013 1: 6613--6622 10.1039/c3tc31320d
- Rimal S, Mukherjee T, Abdelghani J, Goswami A, Chyan O, Stillahn J, Chiba Y, and Maekawa K. "Evaluation of Plasma Damage to Low-k Dielectric Trench Structures by Multiple Internal Reflection Infrared Spectroscopy". ECS Solid State Lett. 2013 3: N1--N4 10.1149/2.001403ssl
- Shin S, Shin JE, and Yoo YJ. "Attachment of alginate microcapsules onto plasma-treated PDMS sheet for retrieval after transplantation". Biotechnol. Appl. Biochem. 2013 60: 617--622 10.1002/bab.1124
- Srinivasan N, Shankar P, and Bandyopadhyaya R. "Plasma treated activated carbon impregnated with silver nanoparticles for improved antibacterial effect in water disinfection". Carbon 2013 57: 1--10 10.1016/j.carbon.2013.01.008
- Sun J-Y, Tseng W-H, Lan S, Lin S-H, Yang P-C, Wu C-I, and Lin C-F. "Performance enhancement in inverted polymer photovoltaics with solution-processed MoOX and air-plasma treatment for anode modification". Sol. Energy Mater. Sol. Cells 2013 109: 178--184 10.1016/j.solmat.2012.10.026
- Tseng W-Y, Hsu S-H, Huang C-H, Tu Y-C, Tseng S-C, Chen H-L, Chen M-H, Su W-F, and Lin L-D. "Low Pressure Radio-Frequency Oxygen Plasma Induced Oxidation of Titanium-Surface Characteristics and Biological Effects". PLoS One 2013 8: e84898 10.1371/journal.pone.0084898
- Valence Sd, Tille J-C, Chaabane C, Gurny R, Bochaton-Piallat M-L, Walpoth BH, and Muller M. "Plasma treatment for improving cell biocompatibility of a biodegradable polymer scaffold for vascular graft applications". Eur. J. Pharm. Biopharm. 2013 85: 78--86 10.1016/j.ejpb.2013.06.012
- Zhang D, and Gan Y. "Effects of plasma treatment on evolution of surface step-terrace structure of critically cleaned c-plane sapphire substrates: An AFM study". Appl. Surf. Sci. 2013 285: 211--214 10.1016/j.apsusc.2013.08.038
- Calchera AR, Curtis AD, and Patterson JE. "Plasma Treatment of Polystyrene Thin Films Affects More Than the Surface". ACS Appl. Mater. Interfaces 2012 4: 3493--3499 10.1021/am300585a
- Chrzanowski W, Szade J, Hart A, Knowles J, and Dalby M. "Biocompatible, smooth, plasma-treated nickel-titanium surface-an adequate platform for cell growth". J. Biomater. Appl. 2012 26: 707--731 10.1177/0885328211416023
- Xiao T, Cui W, Cai M, Liu R, Anderegg JW, Shinar J, and Shinar R. "Thin air-plasma-treated alkali fluoride layers for improved hole extraction in copper phthalocyanine/C70-based solar cells". J. Photonics Energy 2012 2: 21006 10.1117/1.JPE.2.021006
- Zhao L, Lee J, and Sen P. "Long-term retention of hydrophilic behavior of plasma treated polydimethylsiloxane (PDMS) surfaces stored under water and Luria-Bertani broth". Sens. Actuators, A 2012 181: 33--42 10.1016/j.sna.2012.04.038
- He H, Cai W, Lin Y, and Dai Z. "Silver Porous Nanotube Built Three-Dimensional Films with Structural Tunability Based on the Nanofiber Template-Plasma Etching Strategy". Langmuir 2011 27: 1551--1555 10.1021/la104833e
- MacDonald DE, Rapuano BE, and Schniepp HC. "Surface oxide net charge of a titanium alloy: Comparison between effects of treatment with heat or radiofrequency plasma glow discharge". Colloid. Surface. B 2011 82: 173--181 10.1016/j.colsurfb.2010.08.031
- Shah A, Shah S, Mani G, Wenke J, and Agrawal M. "Endothelial cell behaviour on gas-plasma-treated PLA surfaces: the roles of surface chemistry and roughness". J. Tissue Eng. Regener. Med. 2011 5: 301--312 10.1002/term.316
- Yildirim ED, Pappas D, Guceri S, and Sun W. "Enhanced Cellular Functions on Polycaprolactone Tissue Scaffolds by O2 Plasma Surface Modification". Plasma Processes Polym. 2011 8: 256--267 10.1002/ppap.201000009
- Abdul Samad M, Satyanarayana N, and Sinha SK. "Tribology of UHMWPE film on air-plasma treated tool steel and the effect of PFPE overcoat". Surf. Coat. Technol. 2010 204: 1330--1338 10.1016/j.surfcoat.2009.09.011
- Aydin I, and Demirkir C. "Activation of Spruce Wood Surfaces by Plasma Treatment After Long Terms of Natural Surface Inactivation". Plasma Chem. Plasma Process. 2010 30: 697--706 10.1007/s11090-010-9244-5
- Banerjee K, S. Kumar S, Bremmell K, and Griesser H. "Molecular-level removal of proteinaceous contamination from model surfaces and biomedical device materials by air plasma treatment". J. Hosp. Infect. 2010 76: 234--242 10.1016/j.jhin.2010.07.001
- Bystrom E, Nordborg A, Lime F, Dinh NP, and Irgum K. "Plasma brominated polymer particles as grafting substrate for thiol-terminated telomers". J. Sep. Sci. 2010 33: 1563--1570 10.1002/jssc.201000028
- Genish I, Irzh A, Gedanken A, Anderson A, Zaban A, and Klein L. "Coating dielectric substrates by plasma-reduction of metallic ions in solvents". Surf. Coat. Technol. 2010 204: 1347--1352 10.1016/j.surfcoat.2009.09.029
- Griessner M, Hartig D, Christmann A, Ehrentreich-Forster E, Warsinke A, and Bier FF. "Surface regeneration of microfluidic microarray printheads through plasma techniques". J. Micromech. Microeng. 2010 20: 37002 10.1088/0960-1317/20/3/037002
- Gubala V, Le N, Gandhiraman R, Coyle C, Daniels S, and Williams D. "Functionalization of cyclo-olefin polymer substrates by plasma oxidation: Stable film containing carboxylic acid groups for capturing biorecognition elements". Colloid. Surface. B 2010 81: 544--548 10.1016/j.colsurfb.2010.07.055
- Kong J, Yung K, Xu Y, and Tian W. "Wettability transition of plasma-treated polystyrene micro/nano pillars-aligned patterns". eXPRESS Polym. Lett. 2010 4: 753--762 10.3144/expresspolymlett.2010.91
- Li H, Ha CS, and Kim I. "Fabrication of hollow and mesoporous germania microspheres by templating against plasma-treated polystyrene microspheres". J. Sol-Gel Sci. Technol. 2010 53: 232--238 10.1007/s10971-009-2082-3
- Meena J, Chu M-C, Tiwari J, You H-C, Wu C-H, and Ko F-H. "Flexible metal-insulator-metal capacitor using plasma enhanced binary hafnium-zirconium-oxide as gate dielectric layer". Microelectron. Reliab. 2010 50: 652--656 10.1016/j.microrel.2010.01.046
- Meena JS, Chu MC, Kuo SW, Chang FC, and Ko FH. "Improved reliability from a plasma-assisted metal-insulator-metal capacitor comprising a high-k HfO2 film on a flexible polyimide substrate". Phys. Chem. Chem. Phys. 2010 12: 2582--2589 10.1039/b917604g
- Samad MA, Satyanarayana N, and Sinha SK. "Effect of Air-Plasma Pre-treatment of Si Substrate on Adhesion Strength and Tribological Properties of a UHMWPE Film". J. Adhes. Sci. Technol. 2010 24: 2557--2570 10.1163/016942410X508181
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特許
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